行業(yè)應(yīng)用

IC高速分選機(jī)——轉(zhuǎn)塔式分選機(jī)

行業(yè)背景

隨著新興的智能設(shè)備市場(chǎng)需求激增， IC芯片的應(yīng)用和發(fā)展得到大幅提升，常見如汽車電子和消費(fèi)電子、5G、物聯(lián)網(wǎng)以及工業(yè)機(jī)器人產(chǎn)業(yè)等領(lǐng)域，均有廣泛應(yīng)用。

同時(shí)隨著半導(dǎo)體技術(shù)不斷發(fā)展，芯片線寬尺寸不斷減小，制造工序也逐漸復(fù)雜。目前國(guó)際7nm 制程需要將近2000道工序，先進(jìn)的制程和復(fù)雜的工序?qū)⒊掷m(xù)提升對(duì)先進(jìn)設(shè)備的需求。

工作原理

分選機(jī)主要應(yīng)用于芯片設(shè)計(jì)檢驗(yàn)階段和成品終測(cè)（FT）環(huán)節(jié)，是終測(cè)環(huán)節(jié)重要檢測(cè)設(shè)備之一。

轉(zhuǎn)塔式分選機(jī)尤其適用于小型片式半導(dǎo)體分立元件的打標(biāo)、測(cè)試、分選和包裝，是一種主轉(zhuǎn)盤在中心，各個(gè)測(cè)試工位按照順序均布在主電機(jī)周圍的一種高速分選機(jī)，通常包含工位有16個(gè)和24個(gè)等多種型號(hào)。

產(chǎn)品通過上料結(jié)構(gòu)被送到主電機(jī)轉(zhuǎn)盤上;

主電機(jī)轉(zhuǎn)盤吸住芯片并通過轉(zhuǎn)動(dòng)將產(chǎn)品送到下一個(gè)工位;

上料工位工作;

主電機(jī)轉(zhuǎn)盤吸取新的一個(gè)產(chǎn)品。

特點(diǎn)

主電機(jī)每轉(zhuǎn)動(dòng)一格，都會(huì)將產(chǎn)品送到各個(gè)工位，有產(chǎn)品的工位將對(duì)產(chǎn)品進(jìn)行測(cè)試等處理，如此周而復(fù)始

同一時(shí)間會(huì)有多個(gè)工位對(duì)多個(gè)產(chǎn)品進(jìn)行處理

占地面積小、精度高、速度快

技術(shù)難點(diǎn)

轉(zhuǎn)塔式分選機(jī)的優(yōu)點(diǎn)是設(shè)備的每小時(shí)產(chǎn)量較高，當(dāng)前市場(chǎng)上速度快的設(shè)備每小時(shí)可以完成5-6萬(wàn)及更多枚芯片的測(cè)試。

目前轉(zhuǎn)塔式分選機(jī)國(guó)產(chǎn)自給率低，因其 UPH（每小時(shí)分選芯片數(shù)量）是高的一類分選機(jī)，在高速運(yùn)行下，既要保證重復(fù)定位精度，又要保證較低的 Jam Rate（故障停機(jī)比率）， 這對(duì)分選機(jī)設(shè)備開發(fā)提出了更高的要求。

尤其隨著半導(dǎo)體行業(yè)的快速發(fā)展，主轉(zhuǎn)盤工位（高速轉(zhuǎn)塔）的運(yùn)行速度、轉(zhuǎn)動(dòng)精度、振動(dòng)幅度和跳動(dòng)幅度等因素決定了高速分選機(jī)的生產(chǎn)效率和穩(wěn)定性，是整臺(tái)設(shè)備的高效運(yùn)行的核心，這也對(duì)高速轉(zhuǎn)塔工位應(yīng)用的轉(zhuǎn)盤直驅(qū)馬達(dá)的精度、速度、穩(wěn)定性要求越來(lái)越高。

常規(guī)轉(zhuǎn)塔式測(cè)試分選機(jī)技術(shù)要求

16-24個(gè)工位/旋轉(zhuǎn)角度:15°~22.5°

單工位轉(zhuǎn)動(dòng)時(shí)間:18~22ms

轉(zhuǎn)盤慣性:0.003~0.020 kg.m2

測(cè)試時(shí)間:35~60ms

產(chǎn)能:40~60 k UPH

向下/向上Z軸的平均移動(dòng)時(shí)間:3~20ms

雅科貝思應(yīng)用方案

主轉(zhuǎn)盤直驅(qū)方案

主轉(zhuǎn)盤轉(zhuǎn)動(dòng)是高速分選機(jī)重要的運(yùn)動(dòng)之一，而主轉(zhuǎn)盤驅(qū)動(dòng)狀況取決于選取的主電機(jī)性能，雅科貝思ADR-H系列能足夠滿足轉(zhuǎn)塔應(yīng)用的此類運(yùn)動(dòng)曲線，非常適用于高精度的移動(dòng)、速度響應(yīng)要求高和對(duì)端跳要求較高的場(chǎng)合。

從運(yùn)動(dòng)控制的角度看，該過程在技術(shù)上極具挑戰(zhàn)性：它需要轉(zhuǎn)塔電機(jī)以非常高的速度運(yùn)行并承受振動(dòng)。搭載雅科貝思為高速分選機(jī)的直驅(qū)馬達(dá)定制的伺服驅(qū)動(dòng)器，使速度穩(wěn)定性進(jìn)一步提高。

Industry applications
IC high-speed sorting machine - rotary tower sorting machine
Industry background
With the surge in demand in the emerging smart device market, the application and development of IC chips have been greatly improved, commonly used in fields such as automotive electronics and consumer electronics, 5G, the Internet of Things, and industrial robotics industry.
At the same time, with the continuous development of semiconductor technology, the chip linewidth size is constantly decreasing, and the manufacturing process is gradually becoming more complex. At present, the international 7nm process requires nearly 2000 processes, and advanced processes and complex processes will continue to increase the demand for advanced equipment.
operational principle
Sorting machines are mainly used in the chip design inspection stage and the final product testing (FT) stage, and are one of the important testing equipment in the final testing stage.
The rotary tower sorting machine is particularly suitable for marking, testing, sorting, and packaging of small chip semiconductor discrete components. It is a high-speed sorting machine with a main turntable in the center and various testing stations arranged uniformly around the main motor in order. It usually includes multiple models such as 16 and 24 stations.
The product is delivered to the main motor turntable through the feeding structure;
The main motor turntable sucks the chip and rotates it to deliver the product to the next workstation;
Working at the loading station;
The main motor turntable draws a new product.
characteristic
Every time the main motor rotates one grid, it will send the product to each workstation, and the workstation with the product will conduct testing and other processing on the product. This cycle repeats itself
Multiple workstations will process multiple products at the same time
Small footprint, high accuracy, and fast speed
Technical difficulties
The advantage of a rotary tower sorting machine is that the equipment has a high hourly output, and the fastest equipment on the current market can complete testing of 50-60000 or more chips per hour.
At present, the self-sufficiency rate of domestically produced turret sorting machines is the lowest, as their UPH (number of sorting chips per hour) is the highest type of sorting machine. Under high-speed operation, it is necessary to ensure both repeated positioning accuracy and lower Jam Rate (failure shutdown rate), which puts higher requirements on the development of sorting machine equipment.
Especially with the rapid development of the semiconductor industry, factors such as the operating speed, rotational accuracy, vibration amplitude, and jumping amplitude of the main turntable station (high-speed turntable) determine the production efficiency and stability of the high-speed sorting machine, which is the core of the efficient operation of the entire equipment. This also requires increasingly high precision, speed, and stability of the turntable direct drive motor used in high-speed turntable stations.
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Technical requirements for conventional turret test sorting machines
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16-24 workstations/rotation angle: 15 °~22.5 °
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Single station rotation time: 18-22ms
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Rotary table inertia: 0.003~0.020 kg.m2
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Test time: 35-60ms
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Capacity: 40-60 k UPH
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Average movement time of Z-axis down/up: 3-20ms
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IELTS application solution
Main turntable direct drive scheme
The rotation of the main turntable is one of the most important movements of a high-speed sorting machine, and the driving condition of the main turntable depends on the performance of the selected main motor. The Yacobesi ADR-H series can meet the motion curve of the rotary tower application sufficiently, and is very suitable for high-precision movement, high speed response requirements, and high end jump requirements.
From the perspective of motion control, this process is technically challenging: it requires the turret motor to operate at very high speeds and withstand vibrations. Equipped with a servo driver customized by Yacobesi for the direct drive motor of the high-speed sorting machine, the speed stability is further improved.